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Growth-mode induced defects in epitaxial SrTiO3 thin films grown on single crystal LaAlO3 by a two-step PLD process

Published online by Cambridge University Press:  11 March 2011

Dong Su
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology, Lausanne CH-1015, Switzerland; and Department of Physics, Arizona State University, Tempe, Arizona 85287-1504
Tomoaki Yamada
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology, Lausanne CH-1015, Switzerland
Roman Gysel
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology, Lausanne CH-1015, Switzerland
Alexander K. Tagantsev
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology, Lausanne CH-1015, Switzerland
Paul Muralt
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology, Lausanne CH-1015, Switzerland
Nava Setter
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology, Lausanne CH-1015, Switzerland
Nan Jiang*
Affiliation:
Department of Physics, Arizona State University, Tempe, Arizona 85287-1504
*
d)Address all correspondence to this author. e-mail: [email protected]
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Abstract

We grew epitaxial SrTiO3 (STO) thin films on (001) LaAlO3 substrates via a two-step procedure using pulsed laser deposition and studied them with transmission electron microscopy in plane-view and cross-sectional samples. We found that partial misfit dislocations are the main interfacial defects, whereas planar defects are the main defects in STO films. Our results suggest that a three-dimensional island mode dominates the growth of the STO film.

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Articles
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1.Vendik, O.G., Hollman, E.K., Kozyrev, A.B., and Prudan, A.M.: Ferroelectric tuning of planar and bulk microwave devices. J. Supercond. 12, 325 (1999).CrossRefGoogle Scholar
2.Tagantsev, A.K., Sherman, V.O., Astafiev, K.F., Venkatesh, J., and Setter, N.: Ferroelectric materials for microwave tunable applications. J. Electroceram. 11, 5 (2003).CrossRefGoogle Scholar
3.Pertsev, N.A., Tagantsev, A.K., and Setter, N.: Phase transitions and strain-induced ferroelectricity in SrTiO3 epitaxial thin films. Phys. Rev. B 61, R825 (2000).CrossRefGoogle Scholar
4.Canedy, C.L., Li, H., Alpay, S.P., Salamanca-Rica, L., Roytburd, A.L., and Ramesh, R.: Dielectric properties in heteroepitaxial Ba0.6Sr0.4TiO3 thin films: Effect of internal stresses and dislocation-type defects. Appl. Phys. Lett. 77, 1695 (2000).CrossRefGoogle Scholar
5.Li, H., Roytburd, A.L., Alpay, S.P., Tran, T.D., Salamanca-Riba, L., and Ramesh, R.: Dependence of dielectric properties on internal stresses in epitaxial barium strontium titanate thin films. Appl. Phys. Lett. 78, 2354 (2001).CrossRefGoogle Scholar
6.Haeni, J.H., Irvin, P., Chang, W., Uecker, R., Reiche, P., Li, Y.L., Choudhury, S., Tian, W., Hawley, M.E., Craigo, B., Tagantsev, A.K., Pan, X.Q., Streiffer, S.K., Chen, L.Q., Kirchoefer, S.W., Levy, J., and Schlom, D.G.: Room-temperature ferroelectricity in strained SrTiO3. Nature 430, 758 (2004).CrossRefGoogle ScholarPubMed
7.Park, B.H., Peterson, E.J., Jia, Q.X., Lee, J., Zeng, X., Si, W., and Xi, X.X.: Effects of very thin strain layers on dielectric properties of epitaxial Ba0.6Sr0.4TiO3 films. Appl. Phys. Lett. 78, 533 (2001).CrossRefGoogle Scholar
8.Yamada, T., Astafiev, K.F., Sherman, V., Tagantsev, A.K., Muralt, P., and Setter, N.: Strain relaxation of epitaxial SrTiO3 thin films on LaAlO3 by two-step growth technique. Appl. Phys. Lett. 86, 142904 (2005).CrossRefGoogle Scholar
9.Yamada, T., Astafiev, K.F., Sherman, V., Tagantsev, A.K., Su, D., Muralt, P., and Setter, N.: Structural and dielectric properties of strain-controlled epitaxial SrTiO3 thin films by two-step growth technique. J. Appl. Phys. 98, 54105 (2005).CrossRefGoogle Scholar
10.Yamada, T., Sherman, V., Su, D., Tagantsev, A.K., Muralt, P., and Setter, N.: Growth process approaches for improved properties of tunable ferroelectric thin films. J. Eur. Ceram. Soc. 27, 3753 (2007).CrossRefGoogle Scholar
11.Freund, L.B. and Suresh, S.: Thin Film Materials: Stress, Defect Formation and Surface Evolution (Cambridge Press, 2004), pp. 16.CrossRefGoogle Scholar
12.Su, D., Yamada, T., Sherman, V., Tagantsev, A.K., Muralt, P., and Setter, N.: Annealing effect on dislocations in SrTiO3/LaAlO3 heterostructures. J. Appl. Phys. 101, 64102 (2007).CrossRefGoogle Scholar
13.Qin, Y.L., Jia, C.L., Urban, K., Hao, J.H., and Xi, X.X.: Dislocations in SrTiO3 thin films grown on LaAlO3 substrates. J. Mater. Res. 17, 3117 (2002).CrossRefGoogle Scholar
14.Lu, C.J.: Type of dissociated misfit dislocation in perovskite films on LaAlO3. Appl. Phys. Lett. 85, 2768 (2004).CrossRefGoogle Scholar
15.Zhu, X., Chan, H.L.-W., Wong, K.-H., and Hesse, D.: Microstructure of compositionally graded (Ba1-xSrx)TiO3 thin films epitaxially grown on La0.5Sr0.5CoO3-covered (100) LaAlO3 substrates by pulsed laser deposition. J. Appl. Phys. 97, 093503 (2005).CrossRefGoogle Scholar
16.He, J.Q., Vasco, E., Dittmann, R., and Wang, R.H.: Growth dynamics and strain-relaxation mechanisms in BaTiO3 pulsed laser deposited on SrRuO3/SrTiO3. Phys. Rev. B 73, 125413 (2006).CrossRefGoogle Scholar
17.Suzuki, T., Nishi, Y., and Fujimoto, M.: Analysis of misfit relaxation in heteroepitaxial BaTiO3 thin films. Philos. Mag. A 79, 2461 (1999).CrossRefGoogle Scholar
18.Sun, H.P., Pan, X.Q., Haeni, J.H., and Schlom, D.G.: Structural evolution of dislocation half-loops in epitaxial BaTiO3 thin films during high-temperature annealing. Appl. Phys. Lett. 85, 1967 (2004).CrossRefGoogle Scholar
19.Sanchez, F., Herranz, G., Infante, I.C., Fontcuberta, J., Garcia-Cuenca, M.V., Ferrater, C., and Varela, M.: Critical effects of substrate terraces and steps morphology on the growth mode of epitaxial SrRuO3 films. Appl. Phys. Lett. 85, 1981 (2004).CrossRefGoogle Scholar
20.Goh, W.C., Xu, S.Y., Wang, S.J., and Ong, C.K.: Microstructure and growth mode at early growth stage of laser-ablated epitaxial Pb(Zr0.52Ti0.48)O3 films on a SrTiO3 substrate. J. Appl. Phys. 89, 4497 (2001).CrossRefGoogle Scholar
21.Jiang, J.C. and Pan, X.Q.: Microstructure and growth mechanism of epitaxial SrRuO3 thin films on (001) LaAlO3 substrates. J. Appl. Phys. 89, 6365 (2001).CrossRefGoogle Scholar
22.Visinoiu, A., Alexe, M., Lee, H.N., Zakharov, D.N., Pignolet, A., Hesse, D., and Gösele, U.: Initial growth stages of epitaxial BaTiO3 films on vicinal SrTiO3 (001) substrate surfaces. J. Appl. Phys. 91, 10157 (2002).CrossRefGoogle Scholar
23.Shin, J., Kalinin, S.V., Borisevich, A.Y., Plummer, E.W., and Baddorf, A.P.: Layer-by-layer and pseudo-two-dimensional growth modes for heteroepitaxial BaTiO3 films by exploiting kinetic limitations. Appl. Phys. Lett. 91, 202901 (2007).CrossRefGoogle Scholar