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Effects of abrasive particle size and molecular weight of poly(acrylic acid) in ceria slurry on removal selectivity of SiO2/Si3N4 films in shallow trench isolation chemical mechanical planarization

Published online by Cambridge University Press:  03 March 2011

Hyun-Goo Kang ,
Hyung-Soon Park ,
Ungyu Paik  and
Jea-Gun Park
Hyun-Goo Kang
Affiliation:
Nano-SOI Process Laboratory, Hanyang University, Seoul 133-791, Korea; and Division of Advanced Materials Science Engineering, Hanyang University, Seoul 133-791, Korea
Hyung-Soon Park
Affiliation:
Hynix Semiconductor Inc., Icheon-si, Kyungki-do 467-701, Korea
Ungyu Paik*
Affiliation:
Division of Advanced Materials Science Engineering, Hanyang University, Seoul 133-791, Korea
Jea-Gun Park*
Affiliation:
Nano-SOI Process Laboratory, Hanyang University, Seoul 133-791, Korea
*
a) Address all correspondence to these authors. e-mail: [email protected]
b) e-mail: [email protected]
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Abstract

The effects of the molecular weight and concentration of poly(acrylic acid) (PAA) with different primary abrasive sizes in ceria slurry on the nitride film loss, removal rate, film surface roughness, and removal selectivity of SiO2-to-Si3N4 films were investigated by performing chemical mechanical polishing (CMP) experiments using blanket and patterned wafers. In the case of the blanket wafers, we found that for a lower PAA molecular weight, the removal selectivity of SiO2-to-Si3N4 films increased more significantly with increasing PAA concentration in slurry containing a larger primary abrasive size. For the patterned wafers, with a higher PAA molecular weight in the ceria slurry suspension, the erosion of the Si3N4 film was less, but the removed amount was also smaller, and the surface roughness became worse after CMP. These results can be qualitatively explained by the layer of PAA adsorbed on the film surface, in terms of electrostatic interaction and rheological behavior.

Keywords

CMP
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 3 , March 2007 , pp. 777 - 787
Copyright
Copyright © Materials Research Society 2007

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References

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