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The Determination of Elemental Composition, Thickness and Crystalline Phases in Single and Multi-Layer Thin Films

Published online by Cambridge University Press:  06 March 2019

R. A. Brown
Affiliation:
Rigaku/USk, Inc. Danvers, MA
K. Toda
Affiliation:
Rigaku/USk, Inc. Danvers, MA
R. L. Wilson
Affiliation:
Rigaku/USk, Inc. Danvers, MA
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Extract

The purpose of this paper is to show how XRD and XRF can be used as complimentary tools to determine multi-layer thin film composition, both elemental and crystalline, as well as film thickness.

Type
Research Article
Copyright
Copyright © International Centre for Diffraction Data 1989

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