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The Determination of Elemental Composition, Thickness and Crystalline Phases in Single and Multi-Layer Thin Films
Published online by Cambridge University Press: 06 March 2019
Extract
The purpose of this paper is to show how XRD and XRF can be used as complimentary tools to determine multi-layer thin film composition, both elemental and crystalline, as well as film thickness.
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- Copyright © International Centre for Diffraction Data 1989