Aalund, M. P. (1998). Controlling wafer transport in a vacuum environment. MICRO Magazine, June 1998, 93–104. Retrieved from the Internet on June 5, 2006 at http://www.micromagazine.com/archive/98/06/aalund.html.

Aalund, M. P. and Mathia, K. (2001). Emerging trends in fab automation. Silicon Futures, December 2001, 30–33.

Aalund, M. P. and Mathia, K. (2007). Surface finishes for capital equipment in industrial cleanroom environments. Semiconductor International, December 2007. Retrieved from the Internet on December 3, 2007 at http://www.semiconductor.net.

Accuratus, (2009). Aluminum oxide, Al2O3. Retrieved from the Internet on January 19, 2009 at http://www.accuratus.com/alumox.html.

Alentiev, A. and Yampolskii, Y. (2006). Prediction of gas permeation parameters of polymers. In Materials Science of Membranes for Gas and Vapor Separation, ed. Freeman, B., Yampolskii, Y., and Pinnau, I.. New York: Wiley InterScience.Google Scholar

Alwitt, R. S. (2002). Anodizing. Electrochemistry Encyclopedia, Cleveland, OH: Case Western Reserve University. Retrieved from the Internet on February 19, 2006 at http://electrochem.cwru.edu/encycl/art-a02-anodizing.htm.Google Scholar

Aron, P. (1981). Robots revisited – One year later. In Congress of the United States Office of Technology Assessment, Exploratory Workshop on the Social Impacts of Robotics: Summary and Issues, February 1982. Retrieved from the Internet on February 28, 2008 at http://fas.org/ota/otareports/year/1982a.

Asada, H. and Slotine, J. J. E. (1986). Robot Analysis and Control. New York: Wiley InterScience.Google Scholar

Ascher, U. M., Pai, D. K., and Cloutier, B. P. (1997). Forward dynamics, elimination methods, and formulation stiffness in robot simulation. International Journal of Robotics Research, 16, 749–758.CrossRefGoogle Scholar

Asimov, I. (1950). I, Robot. New York: Gnome Press.Google Scholar

Åström, K. and Hägglund, T. (1994). PID Controllers: Theory, Design, and Tuning, 2nd edn. Research Triangle Park, NC: Instrument Society of America.Google Scholar

Belt, Technologies Inc. (1999). Design Guide and Engineer's Reference for Metal Belts. Product brochure. Durham, UK: Belt Technologies, Inc.Google Scholar

Björklöf, D. (1999). Immunity testing: Examining requirements and test methods. Compliance Engineering. Annual Reference Guide, European Edition, 1999, 51. Retrieved from the Internet on March 28, 2008 at http://www.ce-mag.com.

Campbell, W. A. and Scialdone, J. J. (1997). Outgassing Data for Selecting Spacecraft Materials. Reference publication 1124, Rev. 4. Linthicum Heights, MD: NASA Center for AeroSpace Information.Google Scholar

Carlson, A., Le, T., and Hallen, J. (2007). Improving wafer yields with integrated all-surface inspection. Solid State Technology, June 2007.

Chambers, A., Fitch, R. K., and Halliday, B. S. (1998). Basic Vacuum Technology, 2nd edn. London: Taylor & Francis.CrossRefGoogle Scholar

Chase, G. (2008). Ohms per square what! ESD Journal (online). Retrieved from the Internet on March 28, 2008 at http://www.esdjournal.com/techpapr/ohms.htm.

Christensen, C. M., King, S., Verlinden, M., and Yang, W. (2008). The new economics of semiconductor manufacturing. IEEE Spectrum, 45(5), 25–29.CrossRefGoogle Scholar

Clarke, R. (1993). Asimov's laws for robotics: Implications for information technology – Part 1. Computer, 26(12), 53–61.CrossRefGoogle Scholar

Clarke, R. (1994). Asimov's laws for robotics: Implications for information technology – Part 2. Computer, 27(1), 57–65.CrossRefGoogle Scholar

Conrad, K. L., Shiakolas, P. S., and Yih, T. C. (2000). Robotic calibration issues – accuracy, repeatability and calibration. Proceedings of the 8th Mediterranean Conference on Control & Automation (MED 2000), July 17–19, 2000, Rio Patras, Greece.Google Scholar

Craig, J. J. (1989). Introduction to Robotics – Mechanics and Control, 2nd edn. Reading, MA: Addison-Wesley.Google Scholar

Dagalakis, N. G. (1999). Industrial robotics standards. In Handbook of Industrial Robotics, 2nd edn., ed. Nof, S. Y.. New York: John Wiley and Sons.Google Scholar

Danielson, P. (1998). Gas loads in vacuum systems. Vacuum & Thinfilm, October 1998, 37. Retrieved from the Internet on July 4, 2006 at http://www.vacuumlab.com/articles/.

Danielson, P. (2000). Gas loads and o-rings. R&D Magazine, August 2000. Retrieved from the Internet on July 4, 2007 at http://www.vacuumlab.com/articles.

Danielson, P. (2001a). Contamination in vacuum systems, sources and remedies. R&D Magazine, May 2001, 45. Retrieved from the Internet on August 28, 2008 at http://www.vacuumlab.com/articles.

Danielson, P. (2001b). Vacuum envelope penetration. R&D Magazine, September 2001, 82. Retrieved from the Internet on July 24, 2007 at http://www.vacuumlab.com/articles.

Danielson, P. (2003). Choosing the right vacuum materials. R&D Magazine, April 2003. Retrieved from the Internet on August 22, 2006 at http://www.rdmag.com.

Danielson, P. (2004). The use and misuse of O-rings. R&D Magazine, April 2004. Retrieved from the Internet on September 23, 2007 at http://www.rdmag.com.

Danielson, P. (2005). Conditioning vacuum chambers. R&D Magazine, October 2005. Retrieved from the Internet on September 27, 2007 at http://www.rdmag.com.

Defosse, M. (2004). Automatica: Integrated automation, the next big thing. Modern Plastics (online), October 2004. Retrieved from the Internet on March 2, 2005 at http://www.modplas.com.

Denavit, J. and Hartenberg, R. S. (1955). A kinematic notation for lower-pair mechanisms based on matrices. ASME Journal of Applied Mechanics, June 1955, 215–221.

Donovan, R. P. (2001). Contamination-Free Manufacturing for Semiconductors and Other Precision Products. London: CRC Press.Google Scholar

Egan, G. (2000). The automated wet bench in semiconductor cleanrooms. Cleanroom Technology, April 2000.

,ESDA – Electrostatic Discharge Association (2001a). Fundamentals of Electrostatic Discharge – Part 1. Retrieved from the Internet on March 28, 2008 at http://www.esda.org/esd_fundamentals.html.

,ESDA – Electrostatic Discharge Association (2001b). Fundamentals of Electrostatic Discharge – Part 2. Retrieved from the Internet on March 27, 2008 at http://www.esda.org.

Featherstone, R. (2007). Rigid Body Dynamics Algorithms. New York: Springer.Google Scholar

,Ferrotec Corporation (2001). Ferrofluidic Vacuum Rotary Feedthroughs, catalog and product specifications. Retrieved from the Internet on June 1, 2007 at http://www.ferrotec.com.

Gao, J. P. G. (2004). Contamination control in photolithography of SAW filter wafers. Controlled Environments Magazine, October 2004. Retrieved from the Internet on January 20, 2008 at http://www.cemag.us.

Grecu, H. and Kücher, P. (2000). Strategic importance and value of joint ventures in semiconductor technology development. Future Fab International, 8. Retrieved from the Internet on September 25, 2007 at http://www.future-fab.com.

Halliday, B. S. (1987a). An introduction to materials for use in vacuum. Vacuum, 37(8, 9), 583–585.CrossRefGoogle Scholar

Halliday, B. S. (1987b). Cleaning materials and components for vacuum use. Vacuum, 37(8, 9), 587–591.CrossRefGoogle Scholar

Hayati, S. A. and Mirmirani, M. (1985). Improving the absolute position accuracy of robot manipulators. Journal of Robotic Systems, 2(4), 397–413.CrossRefGoogle Scholar

Helgeland, W. (2002). Magnetic Fluid Feedthrough Primer. Rigaku technical report. Retrieved from the Internet on July 4, 2006 at http://www.rigaku.com.

Higuchi, M., Kawamura, T., Kaikogi, T., Murata, T., and Kawaguchi, M. (2003). Cleanroom robots – Clean material handling originated from plant equipment inspection. Technical Review, 40(5), Mitsubishi Heavy Industries.Google Scholar

Hoffman, J. M. (2003). More metal parts go to composites. Machine Design, October 2003. Retrieved from the Internet on March 22, 2008 at http://www.machinedesign.com.

Hoffman, J. M. (2008). Stronger and lighter – Composites make their mark. Machine Design, March 2008. Retrieved from the Internet on March 22, 2008 at http://www.machinedesign.com.

Hollerbach, J. M. (1989). Kinematics and dynamics for control. In Robotics Science, ed. Brady, M.. Cambridge, MA: MIT Press.Google Scholar

Hristu-Varsakelis, D. and Levine, W. S., eds. (2005). Handbook of Networked and Embedded Control Systems. Boston, MA: Birkhäuser.CrossRef

Hudgens, J. (1992). Static Robot Compliance and Metrology Procedures with Applications to a Light Machining Robot. Unpublished Ph.D. dissertation, University of Texas at Austin.Google Scholar

Hudgens, J., Cox, D., and Tesar, D. (2000). Classification structure and compliance modeling for serial manipulators. Proceedings of the IEEE International Conference on Robotics and Automation, April 2000, San Francisco, CA.Google Scholar

,ICE – Integrated Circuit Engineering Corporation (1997). Cost-effective IC Manufacturing 1998–1999. Report ISBN 1-877750-60-3. Scottsdale, AZ: ICE.Google Scholar

,IFR – International Federation of Robotics (2006). World Robotics 2006 – Executive Summary. Frankfurt am Main, Germany: IFR.Google Scholar

,IFR – International Federation of Robotics (2007). World Robotics 2007 – Executive Summary. Frankfurt am Main, Germany: IFR.Google Scholar

,IFR – International Federation of Robotics (2008a). World Robotics 2008 – Welcome to the Press Conference. Frankfurt am Main, Germany: IFR. Retrieved from the Internet on July 9, 2009 at http://www.worldrobotics.org.Google Scholar

,IFR – International Federation of Robotics (2008b). Industrial Robots are Meeting the Changing Demands of Their Customers. Frankfurt am Main, Germany: IFR. Retrieved from the Internet on March 10, 2009 at http://www.worldrobotics.org.Google Scholar

Isom, J. (2004). History of robotics. Retrieved from the Internet on February 28, 2008 at http://www.robotics.megagiant.com/history.html.

Jerz, D. G. (2002). R.U.R. (Rossum's Universal Robots). Retrieved from the Internet on February 28, 2008 at http://jerz.setonhill.edu/resources/RUR.

Kahaner, D. K. (1991). Robots and Use in Japanese Industry. Report, Asian Technology Infomation Program (ATIP), February 1991. Tokyo: ATIP.Google Scholar

Kanetomo, M., Kashima, H., and Suzuki, T. (1997). Wafer-transfer robot for use in ultrahigh vacuum. Journal of Vacuum Science and Technology, 15(3), Part 2, 1384–1387.Google Scholar

Kraz, V. (2003). Effective management of an ESD environment in production. Conformity Magazine, April 2003.

Kunii, I. M. and Port, O. (2001). Robots. Business Week (online), March 19, 2001. Retrieved from the Internet on February 28, 2008 at http://www.businessweek.com.

Kuo, B. C. (1981), Automatic Control Systems. Englewood Cliffs, NJ: Prentice Hall.Google Scholar

Levit, B., Steinman, A., and Avery, C. S. (2007). Improving particle contamination control with in-tool air ionization. Solid State Technology, 50(3), 48–50.Google Scholar

Ljung, L. (1987). System Identification. Englewood Cliffs, NJ: Prentice Hall.Google Scholar

Manji, J. F. (2000). Clean room robots sweep up big savings in semiconductor applications. Robotics Online, 2000. Retrieved from the Internet on November 29, 2004 at http://www.roboticsonline.com.

Marcus, M. (2005). Performance of Hybrid Band-Worm Drives. Technical report ObservatoryScope, Ellijay, GA. Retrieved from the Internet on August 10, 2007 at http://www.observatoryscope.com.Google Scholar

Marquardt, N. (1999). Introduction to the Principles of Vacuum Physics. Lecture. Geneva: CERN Accelerator School on Vacuum Technology.

Mathia, K. (1996). Solutions of Linear Equations and a Class of Nonlinear Equations using Recurrent Neural Networks. Unpublished Ph.D. dissertation, Portland State University.Google Scholar

Mathia, K. and Aalund, M. P. (2002). Full-on for the information age. European Semiconductor, 3, 19–24.Google Scholar

Mathia, K. and Saeks, R. (1994). Inverse kinematics via linear dynamic networks. Proceedings of the World Congress on Neural Networks 1994 (WCNN'94), 2, 47–53, San Diego, CA.Google Scholar

Mattox, D. M. (1998). Handbook of Physical Vapor Deposition (PVD) Processing. Bracknell, UK: Noyes Publications.Google Scholar

McIntyre, J. R. (1997). Japan's Technical Standards – Implications for Global Trade and Competitiveness. London: Quorum Books.Google Scholar

Megahed, S. M. (1993). Principles of Robot Modeling and Simulation. Chichester, UK: John Wiley and Sons.Google Scholar

Mohler, R. R. (1991). Nonlinear Systems, Part 1 – Dynamics and Control. Englewood Cliffs, NJ: Prentice Hall.Google Scholar

Murvihill, W. (1999). Advances in robotic vacuum. Vacuum & Thinfilm, March 1999.

Musser, C. W. (1960). The harmonic drive. Machine Design, April 1960, 166–179.Google Scholar

Nakayama, A., Kimura, H., Watanabe, K., et al. (2005). Low outgassing cables for clean room. Hitachi Cable Review, 24.Google Scholar

Nof, S. Y. (1999). Handbook of Industrial Robotics, 2nd edn. New York: John Wiley and Sons.CrossRefGoogle Scholar

Ogata, K. (1990). Modern Control Engineering, 2nd edn. Englewood Cliffs, NJ: Prentice Hall.Google Scholar

O'Halloran, M., Grout, R., and Pettengill, N. (2002). Oversized cleanrooms assume huge role in emerging flat-panel display production. Cleanrooms, August 2002.

Oppenheim, A. V. and Schafer, R. W. (1989). Discrete-time Signal Processing. Englewood Cliffs, NJ: Prentice Hall.Google Scholar

Papoulis, A. (1991). Probability, Random Variables, and Stochastic Processes, 3rd edn. New York: McGraw-Hill.Google Scholar

Penrose, R. (1955). A generalized inverse for matrices. Proceedings of the Cambridge Philosophical Society, 51, 406–413.CrossRefGoogle Scholar

,Pentagon Technologies (2001). Particle Profiling of Cable Carriers. Test report, March 2001. Fremont, CA.Google Scholar

,Pentagon Technologies (2002). Particle Profile of the IRSI Robot. Test report. Livermore, CA.Google Scholar

,Pentagon Technologies (2004). Particle Profile of the IRSI Robot – Addendum. Test report. Livermore, CA.Google Scholar

Pfeiffer, O., Ayre, A., and Keydel, C. (2003). Embedded Networking with CAN and CANopen. San Clemente, CA: RTC Books.Google Scholar

,Rigaku Corporation (2005). Magnetic Fluid Feedthrough Primer. Technical report. Retrieved from the Internet on September 27, 2009 at http://www.rigaku.com/vacuum/primer.html.

Saravanan, C., Liu, Z., Yang, W., Swisher, M. F., and Tang, A. (2004). Investigating the impact of backside defect inspection on process development and yields. MICRO Magazine, April 2004.

Sasaki, Y. T. (2007). Reducing SS 304/316 hydrogen outgassing to 2 · 10−15 (torr l cm−2 s−1). Journal of Vacuum Science and Technology: Vacuum, Surfaces, and Films, 25(4), 1309–1311.CrossRefGoogle Scholar

Schenker, P. S., Das, H., and Ohm, T. R. (1995). A new robot for high dexterity microsurgery. Proceedings of the Conference on Computer Vision, Virtual Reality, and Robotics in Medicine, April 3–6, 1995, Nice, France.CrossRef

Schicht, H. (2003). The ISO contamination control standards. European Journal of Parenteral Sciences, 8(2), 37–42.Google Scholar

Schroth, T. and Caesar, T. (2001). EN 1822: The standard that greatly impacted the European cleanrooms market. Cleanrooms, October 2001.

Schubert, S. (2005). Taking robots for a ride. CNN Money, August 1, 2005. Retrieved from the Internet on February 26, 2008 at http://www.money.cnn.com/magazines.

Sciavicco, L. and Siciliano, B. (1996). Modeling and Control of Robot Manipulators. New York: McGraw-Hill.Google Scholar

Shiakolas, P. S., Conrad, K. L., and Yih, T. C. (2002). On the accuracy, repeatability, and degree of influence of kinematics parameters for industrial robots. International Journal of Modeling and Simulation, 22(3), 245–254.CrossRefGoogle Scholar

Sontag, E. D. (1990). Mathematical Control Theory. New York: Springer Verlag.CrossRefGoogle Scholar

Sparrow, N. (2004). Virtual leak diameter standard provides alternative to conventional leak testing. European Medical Device Manufacturer, October 2004.

Spong, M. and Vidyasagar, M. (1989). Robot Dynamics and Control. New York: John Wiley and Sons.Google Scholar

Stoianovici, D., Cleary, K., Patriciu, A., et al. (2003). AcuBot: A robot for radiological interventions. IEEE Transactions on Robotics and Automation, 19(5), 927–930.CrossRefGoogle Scholar

Strong, J. (1938). Procedures in Experimental Physics. Bradley, IL: Lindsay Publications.Google Scholar

Sutera, S. P. and Skalak, R. (1993). The history of Poiseuille's law. Annual Review of Fluid Mechanics, 25, 1–19.CrossRefGoogle Scholar

Thomson, W. (1996). Theory of Vibration With Applications, 4th edn. London: Taylor & Francis.Google Scholar

Thong, Y. K., Woolfson, M. S., Crowe, J. A., Hayes-Gill, B. R., and Jones, D. A. (2004). Numerical double integration of acceleration measurements in noise. Science Direct, 36(1), 73–92.Google Scholar

Thornton, J. (2002). Robot safety: ANSI/RIA R15.06-1999 and savvy safeguarding for robotic workcells. Robotics Online, 2002. Retrieved from the Internet on December 2, 2004 at http://www.roboticsonline.com.

Tolani, D., Goswami, A., and Badler, N. I. (2000). Real-time inverse kinematics techniques for anthropomorphic limbs. Graphical Models, 62, 353–388.CrossRef

Tolliver, D. L., ed. (1988). Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology. Westwood, NJ: Noyes Publications.

Urban, R. and Hamid, S. (2005). Extreme-environment lubricant maintains extrusion cleanroom. Plastics Machinery and Auxiliaries, March/April 2005. Retrieved from the Internet on August 15, 2007 at http://www.pma-magazine.com.

Vogler, D. (2002). Evolving business strategies are key to an upbeat 300mm outlook. Solid State Technology, October 2002.

Watanabe, F. (2001). Mechanism of ultralow outgassing rates in pure copper and chromium–copper alloy vacuum chambers: Reexamination by the pressure-rise method. Journal of Vacuum Science & Technology: Vacuum, Surfaces, and Films, 19(2), 640–645.CrossRefGoogle Scholar

Westerberg, L. (1999). The Best Laid Schemes…. Lecture notes. Geneva: CERN Accelerator School on Vacuum Technology.

White, F. M. (2003). Fluid Mechanics. McGraw-Hill Series in Mechanical Engineering. New York: McGraw-Hill.Google Scholar

Winters, P. (2005). IEST updates and improves its Recommended Practice for testing ULPA filters. Cleanrooms, June 2005.

Younkin, G. W. (1996). Industrial Servo Control Systems. New York: Dekker.Google Scholar

Zhuang, H. and Roth, Z. S. (1996). Camera-aided Robot Calibration. Boca Raton, FL: CRC Press.Google Scholar