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Influence of surface treatment on adhesion of iCVD PGMA thin films for wafer-level bonding
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1648 / 2014
- Published online by Cambridge University Press:
- 20 February 2014, mrsf13-1648-hh03-15
- Print publication:
- 2014
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- Article
- Export citation