2 results
Buried Oxide in Silicon by Oxygen Implantation Into Scanned Wafers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 45 / 1985
- Published online by Cambridge University Press:
- 25 February 2011, 305
- Print publication:
- 1985
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- Article
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Carrier Lifetime Reduction by Ion Implantation into Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 27 / 1983
- Published online by Cambridge University Press:
- 25 February 2011, 537
- Print publication:
- 1983
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- Article
- Export citation