3 results
Real-Time Kinetic Analysis of Hydrogen Abstraction and Etching Reactions Using Pulsed-Gas PECVD of Amorphous and Microcrystalline Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 467 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 501
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- 1997
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Real-Time Monitoring of Hydrogen Elimination Processes in Pulsed-Gas PECVD Using in Situ Mass Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 452 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 755
- Print publication:
- 1996
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Inert Gas Dilution and Ion Bombardment Effects in Room Temperature (35°C) Plasma Deposition of a-Si:H
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- Journal:
- MRS Online Proceedings Library Archive / Volume 420 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 399
- Print publication:
- 1996
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