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In-Situ Multiprocessing of Ultrathin Silicon Nitride Capacitors for Advanced Dram Cells
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 195
- Print publication:
- 1994
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- Article
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Cluster-Tool Integrated HF Vapor Etching for Native Oxide Free Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 211
- Print publication:
- 1993
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- Article
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