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Detection of surface electronic defect states in low and high-k dielectrics using reflection electron energy loss spectroscopy
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- Journal:
- Journal of Materials Research / Volume 28 / Issue 20 / 28 October 2013
- Published online by Cambridge University Press:
- 15 October 2013, pp. 2771-2784
- Print publication:
- 28 October 2013
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- Article
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