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Determination of the Distribution of Ion Implantation Boron in Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 647 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, O14.3/R9.3
- Print publication:
- 2000
-
- Article
- Export citation
Determination of the Distribution of Ion Implantation Boron in Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 650 / 2000
- Published online by Cambridge University Press:
- 21 March 2011, R9.3/O14.3
- Print publication:
- 2000
-
- Article
- Export citation