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Microwave Processing of Polyimide Thin Films

Published online by Cambridge University Press:  15 February 2011

David A. Lewis ,
Susan J. Lamaire  and
Thomas Nunes
David A. Lewis
Affiliation:
IBM Corp., T.J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598.
Susan J. Lamaire
Affiliation:
IBM Microelectronics, Hopewell Jnct., NY
Thomas Nunes
Affiliation:
IBM Microelectronics, Hopewell Jnct., NY
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Abstract

Microwave processing has been used to reduce the long process cycles normally associated with the curing cycles for highly ordered polyimides, such as BPDA-PDA. These materials have found applications in the electronics industry due to the excellent thermal stability and low coefficient of thermal expansion of this class of polymers. Thin polymer films - an application not normally considered for microwave curing - were processed and the dependence of the mechanical properties compared with conventional thermal processing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 347: Symposium O – Microwave Processing of Materials IV , 1994 , 681
Copyright
Copyright © Materials Research Society 1994

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References

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