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Structural Properties of Pdxs/V Multilayer thin Films

Published online by Cambridge University Press:  25 February 2011

G. D. Lewen  and
M. B. Stearns
G. D. Lewen
Affiliation:
Department of Physics, Arizona State University, Tempe, AZ 85287
M. B. Stearns
Affiliation:
Department of Physics, Arizona State University, Tempe, AZ 85287
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Abstract

The structures of e-beam evaporated Pd/V multilayer thin films have been studied under various film growth conditions. Both the deposition rate and the substrate temperature were varied in an e-beam source UHV deposition system, and the films were subsequently characterized by xray scattering and cross-sectional TEM.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 221: Symposium C – Heteroepitaxy of Dissimilar Materials , 1991 , 221
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

1 Petford-Long, A. K., Stearns, M.B., Chang, C.-H., Nutt, S.R., Stearns, D.G., Ceglio, N.M., and Hawryluk, A.M., J. Appl. Phys., 61(4), 1422 (1987).CrossRefGoogle Scholar
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5 Lewen, G. D., M. S. thesis, Arizona State University, 1990.Google Scholar