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Preparation and Characterization of Sol-Gel Derived Heteroepitaxial LiNbO3 and LiTaO3 Thin Films

Published online by Cambridge University Press:  21 February 2011

Keiichi Nashimoto
Keiichi Nashimoto*
Affiliation:
Materials Research Laboratory, Fuji Xerox Co., Ltd., 1600 Takematsu, Minamiashigara, Kanagawa, 250-1, Japan
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Abstract

Dense epitaxial LiNbO3 thin films without any misoriented plane on sapphire substrates were obtained with a sol-gel process utilizing 2-methoxyethanol based metal alkoxide precursors without pre-hydrolysis and rapid thermal annealing. Epitaxial LiNbO3 films annealed at 700°C were transparent and showed refractive indices close to bulk single crystal values. Epitaxial and transparent LiTaO3 films crystallized successfully on sapphire substrates with single orientations with the present process. X-ray rocking curve full widths at half maximum of epitaxial LiNbO3 and LiTaO3 films on sapphire (110) substrates and annealed at 700°C were less than 0.4 degree.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 293
Copyright
Copyright © Materials Research Society 1993

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