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Microwave Sintering of Multilayer Ceramic Capacitors*

Published online by Cambridge University Press:  25 February 2011

R. J. Lauf
Affiliation:
Martin Marietta Energy Systems, Oak Ridge, TN 37831-6087
C. E. Holcombe
Affiliation:
Martin Marietta Energy Systems, Oak Ridge, TN 37831-6087
C. Hamby
Affiliation:
Martin Marietta Energy Systems, Oak Ridge, TN 37831-6087
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Abstract

Multilayer ceramic capacitors of several compositions (both Z5U and NPO types) were sintered in air in both conventional and microwave furnaces. Several casketing and insulation techniques were used to improve temperature uniformity and minimize dopant losses. Zirconia and yttria are suitable packing materials as either powders or fibers. After sintering, the packing material remains friable and can be recycled. The presence of metallization layers did not interfere with the microwave process and no arcing was observed at surfaces where the internal electrodes emerged. In some runs, however, local thermal runaway was observed, which could severely decrease process yields and must be eliminated in a commercial process.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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Footnotes

*

Research sponsored by the U.S. Department of Energy, Assistant Secretary for Conservation and Renewable Energy, Office of Industrial Technologies, Advanced Industrial Concepts (AIC) Materials Program, under contract DE-AC05-84OR21400 with Martin Marietta Energy Systems, Inc.

References

REFERENCES

1. Black, J. R., “Technology and Market Trends in Multilayer Ceramic Devices,” pp. 311 in Adv. in Ceramics, Vol. 19, ed. Blum, J. B. and Cannon, W. R., Am. Ceram. Soc., Columbus, OH (1986).Google Scholar
2. Sutton, W. H., “Microwave Processing of Ceramic Materials,” Am. Ceram. Soc. Bull. 68[2], 376–86 (1989).Google Scholar
3. Varadan, V. K., Ma, Y., Lakhtakia, A., and Varadan, V. V., “Microwave Sintering of Ceramics,” Mat. Res. Soc. Symp. Proc., Vol. 124, 4557 (1988).Google Scholar
4. Holcombe, C. E. and Dykes, N. L., “Microwave Sintering of Titanium Diboride,” J. Mat. Sci. M26, 3730–38 (1991).Google Scholar
5. Holcombe, C. E. and Dykes, N. L., “Importance of ‘Casketing’ for Microwave Sintering of Materials,” J. Mat. Sci. Lett. 2, 425–8 (1990).Google Scholar
6. Bible, D. W., Lauf, R. J., and Everleigh, C. A., “Multikilowatt Variable Frequency Microwave Furnace,” Mat. Res. Soc. Symp. Proc., Vol. 269 (1992).CrossRefGoogle Scholar