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Growth of InAs and (InAs)1(GaAs)l Superlattice Quantum Well Structures on GaAs by Atomic Layer Epitaxy Using Trimethylindium-Dimethylethylamine Adduct

Published online by Cambridge University Press:  22 February 2011

Nobuyuki Ohtsuka  and
Osamu Ueda
Nobuyuki Ohtsuka
Affiliation:
FUJITSU LABORATORIES LTD., 10-1 Morinosato-Wakamiya, Atsugi 243-01, Japan
Osamu Ueda
Affiliation:
FUJITSU LABORATORIES LTD., 10-1 Morinosato-Wakamiya, Atsugi 243-01, Japan
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Abstract

Atomic layer epitaxy (ALE) of InAs has been developed using trimethylindium-dimethylethylamine adduct (TMIDMEA) as a novel In source. Distinct self-limiting growth of InAs was successfully carried out over a wide temperature range from 350°C to 500°C because of the high thermal stability of TMIDMEA. The possible growth temperature range for ALE-InAs was extended by using TM1DMEA. These results lead us to conclude that the use of TMIDMEA enables us to grow InAs/GaAs heterostructures at a single growth temperature. Using this technique, (InAs)1(GaAs)l short period superlattice (12 periods) quantum-well structures were grown on a GaAs(100) substrate at 460°C. A photoluminescence peak at 1.3 µm was observed in these structures at room temperature.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 334: Symposium W – Gas-Phase and Surface Chemistry in Electronic Materials Processing , 1993 , 225
Copyright
Copyright © Materials Research Society 1994

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