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Demonstration of Arrays of Sub-Micrometer Solid-State Fresnel Lenses for Electrons

Published online by Cambridge University Press:  17 March 2011

Y. Ito ,
A. L. Bleloch  and
L. M. Brown
Y. Ito
Affiliation:
Currently Department of Physics, University of Illinoisat Chicago 845 W. Taylor St., Chicago, IL 60607-7059, U.S.A.
A. L. Bleloch
Affiliation:
Cavendish Laboratory, University of Cambridge, Madingley Road, Cambridge CB3 0HE, U.K.
L. M. Brown
Affiliation:
Cavendish Laboratory, University of Cambridge, Madingley Road, Cambridge CB3 0HE, U.K.
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Abstract

We demonstrate the focusing action of a compact solid state pixelated Fresnel phase (PFP) lens for electrons (700 nm in diameter), consisting of an array of holes (“pixelated”) directly drilled by a finely focused electron beam in a thin AlF3 thin film on carbon supporting film. The depths of holes, hence the phase of the exit electron wave is varied as a function of radius from the center of the pattern so that the wavelet from each hole can be in phase on axis at a designated focal point thus producing a lens. An array of two types of lenses, convergent and divergent, with nominal focal length of 1 mm for 200 keV electrons was produced. The estimated full-width-half-maximum of the focus is 8 nm. With improvement of the efficiency, these lenses may find applications in parallel electron-beam lithography, in X-ray optics and in light optics.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 636: Symposium D – Nonlithographic and Lithographic Methods of Nanofabrication-From Ultralarge Scale , 2000 , D5.7.1
Copyright
Copyright © Materials Research Society 2001

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References

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