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Combine spectroscopic ellipsometry and grazing x-ray reflectance for fine characterization of complex epitaxial structures

Published online by Cambridge University Press:  15 February 2011

P. Boher  and
J. L. Stehle
P. Boher
Affiliation:
SOPRA S.A., 26 rue Pierre Joigneaux, 92270 Bois-Colombes (France)
J. L. Stehle
Affiliation:
SOPRA S.A., 26 rue Pierre Joigneaux, 92270 Bois-Colombes (France)
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Abstractm

Spectroscopic Ellipsometry (SE) and Grazing X-ray Reflectance (GXR) techniques are applied on different III-V epitaxial structures in order to extract accurately their structural information. Thickness information are obtained directly from Fourier transformation of the GXR spectra and confirmed by simulation of the reflectance curve. Compositions are deduced from SE regression using GXR thickness as input values. Examples on monolayer and bilayer structures are first remembered. Then the potentiality of the method is demonstrated to more complex systems (multilayer mirrors and HEMT structures).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 406: Symposium L – Diagnostic Techniques for Semiconductor Materials Processing , 1995 , 515
Copyright
Copyright © Materials Research Society 1996

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References

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