Hostname: page-component-586b7cd67f-dsjbd Total loading time: 0 Render date: 2024-11-23T17:53:17.413Z Has data issue: false hasContentIssue false
  • English
  • Français

X-ray spectral imaging in the STEM for microelectronics failure analysis

Published online by Cambridge University Press:  24 July 2003

P.G. Kotula  and
M.R. Keenan
P.G. Kotula
Affiliation:
Sandia National Laboratories, PO Box 5800, Albuquerque, NM 87185-0886
M.R. Keenan
Affiliation:
Sandia National Laboratories, PO Box 5800, Albuquerque, NM 87185-0886

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 998 - 999
Copyright
Copyright © Microscopy Society of America 2003