Recently, SEM (Scanning Electron Microscope) and the other observation devices are coming to use a LAN (Local Area Network) to save the image in the database. We developed a remote control system in which SEM image and Control interface is indicated on the WEB Browser. in this system, SEM can be controlled by an external (client) PC installed in a general WEB Browser(Internet Explorer). Accordingly, operation interface can be indicated on the WEB browser.

A JSM-6700F is connected to a LAN, and so the microscope can be controlled by a client PC. Figure. 1 shows the block diagram of SEM remote control system. The JSM-6700F has two lines to the LAN for image transfer and communication with the SEM control. in order to transfer the image, the image size squeezes from 1280 × 1024-pixels (SEM image size) to 640 × 480-pixels for quick transfer. The image signal (640 × 480-pixels) is connected to the video server only, and then the image transfers to the client PC via LAN . The SEM control communicates with client PC for external command. On the other hand, the SEM control interface and the image are indicated on WEB Browser (Internet explorer) as shown Figure 2. The SEM control interface is composed of the SEM image area and the SEM control part. The SEM image indicates the 640×480-pixels live image. This pixel number was an image quality sufficient to adjust the focus. When a high quality image is necessary, the image of 1280 × 1024-pixels is saved on the the SEM(server) side by choosing the image save button.