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Optimizing STEM Optics for EELS of Amorphous and Crystalline Materials in Semiconductors

Published online by Cambridge University Press:  30 July 2021

Amish Shah  and
Yoselin Rangel
Amish Shah
Affiliation:
Intel Corporation, Corporate Quality Network, Hillsboro, Oregon, United States
Yoselin Rangel
Affiliation:
Intel Corporation, Corporate Quality Network, Hillsboro, Oregon, United States

Abstract

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Type
Advanced Imaging and Spectroscopy for Nanoscale Materials Characterization
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 610 - 611
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America