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Observation of cross sectional semiconductor sample with newly developed SEI/STEM/TEM microscope

Published online by Cambridge University Press:  22 July 2003

N. Endo ,
T. Kuba ,
T. Suzuki ,
E. Okunishi  and
M. Kersker
N. Endo
Affiliation:
Application and Research Center, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japa
T. Kuba
Affiliation:
Application and Research Center, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japa
T. Suzuki
Affiliation:
Application and Research Center, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japa
E. Okunishi
Affiliation:
Application and Research Center, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japa
M. Kersker
Affiliation:
JEOL USA, Inc. 11 Dearborn Rd. Peabody, MA 0196

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 494 - 495
Copyright
Copyright © Microscopy Society of America 2003