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New Imaging modality for surface and sub-surface imaging using Scanning Transmission Helium Ion Microscopy

Published online by Cambridge University Press:  30 July 2021

Saba Tabean ,
Santhana Eswara ,
Michael Mousley ,
Olivier De Castro ,
Jean-Nicolas Audinot  and
Tom Wirtz
Saba Tabean
Affiliation:
Luxembourg Institute of Science and Technology (LIST), Belvaux, Luxembourg
Santhana Eswara
Affiliation:
Luxembourg Institute of Science and Technology, Belvaux, Luxembourg
Michael Mousley
Affiliation:
Luxembourg Institute of Science and Technology, Belvaux, Luxembourg
Olivier De Castro
Affiliation:
Luxembourg Institute of Science and Technology (LIST), Luxembourg
Jean-Nicolas Audinot
Affiliation:
Luxembourg Institute of Science and Technology (LIST), Luxembourg
Tom Wirtz
Affiliation:
Luxembourg Institute of Science and Technology (LIST), Belvaux, Luxembourg

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in and Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 770 - 772
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Hlawacek, G., Veligura, V., van Gastel, R., & Poelsema, B. (2014). Helium ion microscopy. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 32(2), 020801.Google Scholar
van Gastel, R., Hlawacek, G., Dutta, S., & Poelsema, B. (2015). Backscattered helium spectroscopy in the helium ion microscope: Principles, resolution and applications. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 344, 44-49.CrossRefGoogle Scholar
Veligura, V., Hlawacek, G., van Gastel, R., Zandvliet, H. J., & Poelsema, B. (2014). A high resolution ionoluminescence study of defect creation and interaction. Journal of physics: Condensed matter, 26(16), 165401.Google ScholarPubMed
Serralta, E., Klingner, N., De Castro, O., Mousley, M., Eswara, S., Pinto, S. D., … & Hlawacek, G. (2020). Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector. Beilstein Journal of Nanotechnology, 11(1), 1854-1864.CrossRefGoogle ScholarPubMed
Wirtz, T., De Castro, O., Audinot, J. N., & Philipp, P. (2019). Imaging and analytics on the helium ion microscope. Annual Review of Analytical Chemistry, 12, 523-543.CrossRefGoogle ScholarPubMed
Serralta, E., Klingner, N., De Castro, O., Mousley, M., Eswara, S., Pinto, S. D., … & Hlawacek, G. (2020). Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector. Beilstein Journal of Nanotechnology, 11(1), 1854-1864.CrossRefGoogle ScholarPubMed
This work was funded by the Luxembourg National Research Fund (FNR) by the grant PRIDE17/12246511/PACEGoogle Scholar