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Low Damage Sample Preparation of Semiconductor Materials Using Low Energy Ion Milling

Published online by Cambridge University Press:  24 July 2003

S. Roberts ,
D. Flatoff  and
W. Chiou
S. Roberts
Affiliation:
South Bay Technology, Inc., San Clemente, CA 92673
D. Flatoff
Affiliation:
South Bay Technology, Inc., San Clemente, CA 92673
W. Chiou
Affiliation:
UC Irvine, Dept of Chemical, Biochemical & Materials Science, Materials Characterization Center, Irvine, CA 92697

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 810 - 811
Copyright
Copyright © Microscopy Society of America 2003