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Local Lattice Parameter Determination of Strained Areas of Semiconductors Using CBED

Published online by Cambridge University Press:  01 August 2004

Takayuki Akaogi ,
Kenji Tsuda ,
Masami Terauchi  and
Michiyoshi Tanaka
Takayuki Akaogi
Affiliation:
Tohoku University, Japan Asahi-Kasei Co. Ltd., Japan
Kenji Tsuda
Affiliation:
Tohoku University, Japan
Masami Terauchi
Affiliation:
Tohoku University, Japan
Michiyoshi Tanaka
Affiliation:
Tohoku University, Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 310 - 311
Copyright
© 2004 Microscopy Society of America

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