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Improved Focused Ion Beam Sample Preparation Techniques for Transmission Electron Microscopy and Failure Analysis of Memristor Devices

Published online by Cambridge University Press:  30 July 2021

Benson Athey ,
Krishnamurthy Mahalingam ,
Sabyasachi Ganguli ,
Albert Hilton  and
Rohan Dhall
Benson Athey
Affiliation:
UES, Inc., Dayton,, Ohio, United States
Krishnamurthy Mahalingam
Affiliation:
UES, Inc., Dayton,, Ohio, United States
Sabyasachi Ganguli
Affiliation:
Air Force Research Laboratory, United States
Albert Hilton
Affiliation:
KBR, Beavercreek,, Ohio, United States
Rohan Dhall
Affiliation:
Lawrence Berkeley National Laboratory, United States

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in and Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 436 - 437
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America