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High Throughput Fabrication Process of a Zernike Phase Plate

Published online by Cambridge University Press:  27 August 2014

Y. Konyuba ,
H. Iijima ,
Y. Abe ,
M. Suga  and
Y. Ohkura
Y. Konyuba
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
H. Iijima
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Y. Abe
Affiliation:
Yamagata Research Institute of Technology, Matsuei 2-2-1, Yamagata, 990-2473, Japan
M. Suga
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Y. Ohkura
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 222 - 223
Copyright
Copyright © Microscopy Society of America 2014 

References

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