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Expanding Capabilities of Low-kV STEM Imaging and Transmission Electron Diffraction in FIB/SEM Systems

Published online by Cambridge University Press:  04 August 2017

Tomáš Vystavěl ,
Lubomír Tůma ,
Pavel Stejskal ,
Marek Unčovský ,
Jan Skalický  and
Richard Young
Tomáš Vystavěl
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, Brno, Czech Republic
Lubomír Tůma
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, Brno, Czech Republic
Pavel Stejskal
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, Brno, Czech Republic
Marek Unčovský
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, Brno, Czech Republic
Jan Skalický
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, Brno, Czech Republic
Richard Young
Affiliation:
Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 554 - 555
Copyright
© Microscopy Society of America 2017 

References

[1] Kaiser, U & Stöger-Pollach, M Ultramicroscopy 145 2014). p. 1.Google Scholar
[2] Vystavel, , et al, Microscopy and Microanalysis 22(S3 2016). p. 30.CrossRefGoogle Scholar
[3] http://medipix.web.cern.ch/medipix/.Google Scholar