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A Comparison of Nanometrology Using SEM and TEM

Published online by Cambridge University Press:  01 August 2005

J B Warren  and
B J Panessa-Warren
J B Warren
Affiliation:
Brookhaven National Laboratory
B J Panessa-Warren
Affiliation:
Brookhaven National Laboratory

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 1932 - 1933
Copyright
© 2005 Microscopy Society of America