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Cobalt Doping in Tantalum Nitride Thin Films Prepared by Sputtering

Published online by Cambridge University Press:  30 July 2020

Sam Macartney ,
Leigh Sheppard  and
Richard Wuhrer
Sam Macartney
Affiliation:
Western Sydney University, Sydney, New South Wales, Australia
Leigh Sheppard
Affiliation:
Western Sydney University, Penrith, Northern Territory, Australia
Richard Wuhrer
Affiliation:
Western Sydney University, Penrith, New South Wales, Australia

Abstract

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Type
Energy and Soft Materials and the Development of Cryogenic Techniques for Studying Them
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2810 - 2812
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Copyright
Copyright © Microscopy Society of America 2020

References

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