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Atom Probe Tomography Characterization of Multilayer Films

Published online by Cambridge University Press:  21 July 2003

G.B. Thompson ,
H.L. Fraser  and
M. K. Miller
G.B. Thompson
Affiliation:
Materials Science and Engineering Department, Ohio State University, Columbus, OH 4321
H.L. Fraser
Affiliation:
Materials Science and Engineering Department, Ohio State University, Columbus, OH 4321
M. K. Miller
Affiliation:
Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN 37831-613

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 574 - 575
Copyright
Copyright © Microscopy Society of America 2003