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Microstructure and Thermal Conductivity of AlN(Y2O3) Ceramics

Published online by Cambridge University Press:  02 July 2020

Y. D. Yu ,
A. M. Hundere ,
R. Høier ,
M. -A. Einarsrud  and
R. E. Dunin-Borkowski
Y. D. Yu
Affiliation:
Department of Physics, Norwegian University of Science and Technology, N-7491Trondheim, Norway
A. M. Hundere
Affiliation:
Elkem Refractories, Torshov, N-0402 Oslo, Norway
R. Høier
Affiliation:
Department of Physics, Norwegian University of Science and Technology, N-7491Trondheim, Norway
M. -A. Einarsrud
Affiliation:
Department of Chemistry, Norwegian University of Science and Technology, N-7491 Trondheim, Norway
R. E. Dunin-Borkowski
Affiliation:
Department of Materials, Park Road, OxfordOX1 3PH, United Kingdom
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Extract

Aluminum nitride (AIN) with high thermal conductivity has been considered as a potential substrate material for microelectronics. However, the thermal conductivity of polycrystalline AIN ceramics, prepared by liquid-phase sintering, is significantly lower than that of AIN single crystal. It has been shown that the thermal conductivity of AIN is inversely proportional to the oxygen content dissolved in the AIN lattice. Furthermore, the microstructure of AIN can also influence the thermal conductivity considerably. In the present study, we investigated the effect of grain boundaries and secondary phase distributions on thermal conductivity of two selected high density samples which contained similar oxygen content but showed different thermal conductivities.

Experimental details and selected properties of Samples A and B are shown in Table 1. Sample A with 0.8 wt% Y2O3 additive was embedded in an AIN powder bed in a BN crucible covered by a BN lid (not gas tight) during sintering, while Sample B with 3.9 wt% Y2O3 was embedded in an AIN powder bed in an open graphite crucible.

Type
Ceramics & Minerals
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 422 - 423
Copyright
Copyright © Microscopy Society of America

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References

1.Slack, G. A. et al., J. Phys. Chem. Solids, 48 (1987) 641.CrossRefGoogle Scholar
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4. The authors thank the Norwegian Research Council for financial support, and Dr. J.L. Hutchison for permission to use JEOL JEM-3000F in Oxford.Google Scholar