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Metallurgical reactions of Sn-3.5Ag solder with various thicknesses of electroplated Ni/Cu under bump metallization

Published online by Cambridge University Press:  03 March 2011

Chang Pin Huang ,
Chih Chen ,
C.Y. Liu ,
S.S. Lin  and
K.H. Chen
Chang Pin Huang
Affiliation:
Department of Material Science and Engineering, National Chiao Tung University, Hsinchu 30050, Taiwan, Republic of China
Chih Chen*
Affiliation:
Department of Material Science and Engineering, National Chiao Tung University, Hsinchu 30050, Taiwan, Republic of China
C.Y. Liu
Affiliation:
Department of Chemical Engineering and Materials Engineering, National Central University, Chung-Li, Taiwan, Republic of China
S.S. Lin
Affiliation:
Megic Corporation, Ltd., Hsin-chu 300, Taiwan, Republic of China
K.H. Chen
Affiliation:
Megic Corporation, Ltd., Hsin-chu 300, Taiwan, Republic of China
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Nickel has been widely used as an under-bump metallization (UBM) material in the microelectronics industry. The solid-state reaction between the eutectic SnAg solder bumps and three thicknesses of Ni/Cu UBM was investigated, with 5 μm-Cu/3 μm-Ni, 3 μm-Cu/2 μm-Ni, and 0 μm-Cu/1 μm-Ni. It was found that the shear strength of the solder bumps decreased after the solid-state aging at 150 °C for 200 h, and it did not change much after it was prolonged for 500 and 1000 h. Aging of the Ag3Sn intermetallic compound (IMC) and grain growth of the solder are responsible for the decrease in the shear strength. Furthermore, the shear test results indicated that the fracture mode switched from ductile to brittle for the solder bumps with 1 μm Ni after aging longer than 200 h, causing the strength of the solder to decrease abruptly. This is attributed to the consumption of the peripheral Ni layer after the solid-state aging for 1000 h. The Ni consumption rate was measured to be 0.02 μm/h1/2 at 150 °C.

Keywords

DiffusionPackaging
Type
Articles
Information
Journal of Materials Research , Volume 20 , Issue 10 , October 2005 , pp. 2772 - 2779
Copyright
Copyright © Materials Research Society 2005

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